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Rough anti-stiction layer for MEMS device Patent Grant Chen , et al. Sep [Taiwan Semiconductor Manufacturing Co., Ltd.]
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Advanced Vapor-Phase Surface Modification | IST | Vapor deposited nano-films & nano-coatings for your devices
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Investigation of anti-stiction coating for ohmic contact MEMS switches with thiophenol and 2-naphthalenethiol self-assembled monolayer - ScienceDirect
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PPT - Vapor Deposition Of Anti-Stiction Films And The Equipment Used For That Purpose. PowerPoint Presentation - ID:4833044
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PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar
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IR microscope image of lateral anti-stiction MEMS test structures: a... | Download Scientific Diagram
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Anti-stiction process for MEMS device Patent Grant Weng , et al. Dec [Taiwan Semiconductor Manufacturing Co., Ltd.]
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